Products Precision Optics
DGF
DGF
DGF
Feature
Product Description
Product introduction and application:
Improve Slitu uniformity to meet target.
Applied Tool: ASML PAS5500/ 550 or 700 (DUV), 200 or 400 (i-line)

Competitive advantages:
Verified by TSMC

 

DGF Product Description

Product introduction and application:
Improve Slitu uniformity to meet target.
Applied Tool: ASML PAS5500/ 550 or 700 (DUV), 200 or 400 (i-line)
 

DGF Competitive advantages:

Verified by TSMC

 

 

 


數位梯度濾光片
DGF-數位梯度濾光片

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

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